1-Fundamentals2-Processing of smart materials3-Sensors for smart systems4-Actuators for smart systems5-Design examples for sensors and actuators6-Introductory concepts in modeling7-Introduction to the finite element method8-Modeling of smart sensors and actuators9-Active control techniques10-Silicon fabrication techniques for MEMS11-Polymeric MEMS fabrication techniques12-Integration and packaging of smart microsystems13-Fabrication examples of smart microsystems14-Structural health monitoring applications15-Vibration and noise-control applications