1.Microelectromechanical Systems (MEMS) and Radi Frequency MEMS
2.MEMS Materials and Fabrication Techniques
3.RF MEMS Switches and Micro Relays
4.MEMS Inductors and Capacitors
5.Miromachined RF Filters
6.Miromachined Phase Shifters
7.Miromachined Transmission Lines and Components
8.Micromachined Antennae
9.Integration and Packaging for RF MEMS Devices
1-Fundamentals2-Processing of smart materials3-Sensors for smart systems4-Actuators for smart systems5-Design examples for sensors and actuators6-Introductory concepts in modeling7-Introduction to the finite element method8-Modeling of smart sensors and actuators9-Active control techniques10-Silicon fabrication techniques for MEMS11-Polymeric MEMS fabrication techniques12-Integration and packaging of smart microsystems13-Fabrication examples of smart microsystems14-Structural health monitoring applications15-Vibration and noise-control applications
