1. Introduction2. Scaling of Micromechanical Devices3. Mechanical Properties of MEMS Materials4. Flow Physics5. Integrated Simulation for MEMS: CouplingFlow-Structure-Thermal-Electrical Domains6. Molecular-Based Microfluidic Simulation Models7. Molecular-Based Microfluidic Simulation Models8. Burnett Simulations of Flows in Microdevices9. Lattice Boltzmann Simulations of Slip Flow in Microchannels10. Liquid Flows in Microchannels11. Lubrication in MEMS12. Physics of Thin Liquid Films13. Bubble/Drop Transport in Microchannels14. Fundamentals of Control Theory15. Model-Based Flow Control for Distributed Architectures16. Soft Computing in Control
