1. Introduction2. Electronic Materials and Processing3. MEMS Materials and their Preparation4. Standard Microelectronic Technologies5. Silicon Micromachining: Bulk6. Silicon Micromachining: Surface7. Microstereolithography for MEMS8. Microsensor9. Introduction to SAW Devices10. Surface Acoustic Waves in Solids11. IDT Microsensor Parameter Measurement12. IDT Microsensor Fabrication13. IDT Microsensors 14. MEMS-IDT Microsensors15. Smart Sensors and MEMSAppenix A. List of AbbreviationsB. List of Symbols and PrefixesC. List of Some Important TermsD. Fundamental ConstantsF. Properties of Electronic & MEMS Metallic MaterialsG. Properties of Electronic & MEMS Semiconducting MaterialsH. Properties of Electronic & MEMS Ceramic and PolymerMaterialsI. Complex Reciprocity Relation and Perturbation AnalysisJ. Coupled-mode Modeling of a SAW DeviceK. Suggested Further ReadingL. WebographyM. List of Worked Examples
