1. MEMS :A technology from Lilliput
2. The Sandbox: Materials for MEMS
3. The toolbox: Processor for micromachining
4. The Gearbox: Vommercial MEM structures and systems
5. The new gearbox : A peek into the future
6. The box: Packaging for MEMS
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1. MEMS: A Technology from Lilliput2. Materials for MEMS3. Processes for Micromachining4. MEM Structures and Systems in Industrial and Automotive Applications5. MEM Structures and Systems in Photonic Applications6. MEMS Applications in Life Sciences7. MEM Structures and Systems in RF Applications8. Packaging and Reliability Considerations for MEMS
